Comparative study of sculptured metallic thin films deposited by oblique angle deposition at different temperatures

• Susann Liedtke,
• Christoph Grüner,
• Jürgen W. Gerlach and
• Bernd Rauschenbach

Beilstein J. Nanotechnol. 2018, 9, 954–962, doi:10.3762/bjnano.9.89

• substrate temperature is found for those films. Keywords: biaxial texture; metallic tilted columns; oblique angle deposition; porosity; shadowing; thin films; Introduction The ability to produce highly porous metallic thin films is a substantial issue for a large number of applications [1]. For instance

• columns. As a consequence, metallic tilted columns deposited at low temperatures (77 K) grow with similar morphologies since the growth process is dominated by shadowing. Albeit all investigated metals grow with comparable morphologies at 77 K, a closer look at Figure 4 reveals differences in the diameter